Vacuum Load Lock Door

1x10 10 torr temperature range 20ºc to 150ºc magnets must be removed for 150ºc rating.

Vacuum load lock door.

Home motion manipulation manipulation load lock systems bolt kits for quick access doors with clearance holes. All access doors are supplied with viton elastomer seals suitable for high vacuum service. 022 transfer valve monovat direct for load lock and process chamber isolation in semiconductor production systems for 200 300 and 450 mm wafers. For load lock and process chamber isolation in semiconductor production systems for 200 and 300 mm wafers.

See quick access doors section vacuum range. Doors are hinged and fitted with a swingaway hand knob locking mechanism. Load lock chambers are provided with a six inch cf flange for mounting to the gate valve a six inch add a door with 7056 glass viewport a 2 75 inch cf flange for attachment of the linear feedthrough and two 2 75 inch cf flanges for pumping. Doors are hinged and fitted with a swingaway hand knob locking mechanism.

Viewport fitted doors are constructed with corning type 7056 glass fused to a kovar nickel iron transition sleeve. Description quick access doors provide convenient and fast manual loading of samples in and out of vacuum chambers. For conversion tables click here. The chambers are equipped with uhv connecting flanges and additional ports for future versatility.

Precision hinged access doors seal with a fluorocarbon o ring. Offered in a wide range of uhv flange sizes with or without viewport glass. Enable quick and convenient access into vacuum vessels such as process chambers and load locks. Bolt kits for quick access doors with clearance holes.

A range of options exist for e g. Quick access doors provide convenient and fast manual loading of samples in and out of vacuum chambers. For complete instructions and parts needed to fix your door locks and other related vacuum problems go here. Mdc vacuum products llc is an iso 9001 2015 certified company.

The top port of the load lock chamber mechanism is usually sealed by a viton gasket. Viewport fitted doors are constructed with corning type 7056 glass fused to a kovar nickel iron transition sleeve. 30ºc maximum when attached.